Formation of plano-convex micro-lens array in fused silica glass using CO2 laser assisted reshaping technique

摘要

We report on fabricating high-fill-factor plano-convex spherical and squaremicro-lens arrays on fused silica glass surface using CO2 laser assistedreshaping technique. Initially, periodic micro-pillars have been encoded on theglass surface by means of a femtosecond laser beam. Afterwards, themicro-pillars are polished several times by irradiating a CO2 laser beam on topof the micro-pillars. Consequently, spherical micro-lens array with micro-lenssize of 50 um x 50 um and square micro-lens array with micro-lens size of 100um x 100 um are formed on fused silica glass surface. We also study theintensity distribution of light passed through the spherical micro-lens arrayengraved glass sample. The simulation result shows that, the focal length ofthe spherical micro-lens array is 35 um. Furthermore, we investigate theoptical properties of the micro-lens array engraved glass samples. The proposedCO2 laser based reshaping technique is simple and fast that shows promises infabrication arrays of smooth micro-lenses in various transparent materials.